vite run using v0.22.1 gives "Cannot use 'import.meta' outside a module"

Describe the bug

Hi, When compiling the vite project after updating to v0.22.1 (v0.22.0 works fine), I am getting the following error:

SyntaxError: Cannot use 'import.meta' outside a module
    at wrapSafe (internal/modules/cjs/loader.js:1001:16)
    at Module._compile (internal/modules/cjs/loader.js:1049:27)
    at Module._extensions..js (internal/modules/cjs/loader.js:1114:10)
    at Object._require.extensions.<computed> [as .js] (.../vite/dist/node/chunks/dep-71eb12cb.js:62910:17)
    at Module.load (internal/modules/cjs/loader.js:950:32)
    at Function.Module._load (internal/modules/cjs/loader.js:790:12)
    at Module.require (internal/modules/cjs/loader.js:974:19)
    at require (internal/modules/cjs/helpers.js:101:18)
    at Object.<anonymous> (C:\...\unplugin-vue-components\dist\vite.js:3:24)
    at Module._compile (internal/modules/cjs/loader.js:1085:14)

The Vite version is: 3.0.4. Let me know if I can provide anything else to help debug.

Reproduction

Use vite with v0.22.1

System Info

System:
    OS: Windows 10 10.0.19044
    CPU: (12) x64 AMD Ryzen 5 5600X 6-Core Processor
    Memory: 15.68 GB / 31.92 GB
  Binaries:
    Node: 14.20.0 - C:\Program Files\nodejs\node.EXE
    npm: 8.5.4 - C:\Program Files\nodejs\npm.CMD
  Browsers:
    Edge: Spartan (44.19041.1266.0), Chromium (103.0.1264.77)
    Internet Explorer: 11.0.19041.1566

Used Package Manager

npm

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